MEMS

创建于2008-06-04     组长： 海若

MEMS=Micro-Electro-Mechanical Systems，简称微机械系统/微机电系统/微电子机械系统。

Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible "micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices.

http://www.memsnet.org/mems/what-is.html